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6. Coating
- Energy Saving
- By Industry ? Process
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|6. Coating
Film is coated with various types of solvents, depending on the application.
Stainless Steel High Vacuum Angle/In-line Valve XM/XY
High Vacuum Equipment ? High Vacuum ValvesEquipment for the Semiconductor Industries ? Exhaust Line
Equipment for the Semiconductor Industries ? N2 Gas/Air Supply Line
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?The precision casting, unified composition prevents the accumulation of gas.
?The XM series is interchangeable with the XL series aluminum high vacuum angle valve.
Note) Size 16 is not available for the in-line type.
Safety Instructions System Configuration/Role of Each Line and Component Series Variations Glossary Auto Switches Common Specifications Green Procurement (RoHS)
| Series | Actuation | Shaft seal type | Valve type | Material | Flange size |
|---|---|---|---|---|---|
| XMA/XYA | Air operated | Bellows seal | Single acting (N.C.) | Body : SCS13 (Equivalent to stainless steel 304) Bellows : Stainless steel 316L | 16 to 80 Note) |
| XMC/XYC | Air operated | Bellows seal | Double acting | Body : SCS13 (Eequivalent to stainless steel 304) Bellows : Stainless steel 316L | 16 to 80 Note) |
| XMD/XYD | Air operated | Bellows/O-ring seal | Single acting (N.C.) | Body : SCS13 (Equivalent to stainless steel 304) Bellows : Stainless steel 316L | 25 to 80 |
| XMH/XYH | Manual | Bellows seal | Manual | Body : SCS13 (Equivalent to stainless steel 304) Bellows : Stainless steel 316L | 16 to 50 Note) |
