|Low dew point clean air (For clean room)
■Application
?Blowing semiconductor parts in the clean room
■Air Preparation System
Click the model name to see detailed product information.
AT,HAA/HAW:Not required when attached to air compressors.
AT:Required for screw compressors when it is used to accumulate pressure.
■Impurity in compressed air 
| Moisture | Filtration | Oil mist density Note 1) |
Oil odor | Quality grade as system Note 2) |
|
|---|---|---|---|---|---|
| Dew point | Moisture content | ||||
|
Atmospheric pressure dew point：-30 to -60℃
Pressure dew point：-6 to -42℃(At 0.7 MPa) |
0.5g to 0.02g/m3
(ANR) |
0.01μm
(Filtering efficiency 99.99%) |
Max.0.004mg/m3
(ANR) 0.0032 ppm |
No |
1,1,1 Note 3) 1,2,1 1,3,1 |
Note 1) When the inlet oil mist density (compressed air density) is approximately 30 mg/m3 (ANR) or less.
Note 2) This describes the grade of compressed air quality based on ISO8573-1: 2010 (JIS B8392-1: 2012), which is the maximum quality grade for the system.
It varies, however, depending on the inlet air conditions.
Note 3) Contact SMC since this can be manufactured as a special order (depending on the operating conditions).
